Experimental Characterization of the Electrostatic Levitation Force in MEMS Transducers
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Vibration and Acoustics
سال: 2020
ISSN: 1048-9002,1528-8927
DOI: 10.1115/1.4046625